×
×
×
×
×
×
Qualification

Techcomp headquarters  Techcomp regional offices  Manufacturing, design and R&D facilities

product
Surface Science Techcomp Instruments Hitachi Analytical Instrument Analytical Instrument Chromatography Lasers and LEDs Laboratory Equipment Laboratory Weighing Gas Sensors Technical Service Parts & Consumable

Home· · ·Product· · ·Surface science

Surface science
Hitachi Ultrahigh-Resolution Scanning Electron Microscope SU8600

The SU8600 brings in a new era of ultrahigh-resolution cold-field emission scanning electron microscopes to the long-standing Hitachi EM lineup. This revolutionary CFE-SEM platform incorporates multifaceted imaging, automation, increased system stability, efficient workflows for users of all experience levels, and more.

DownloadOnline messages
Sale area:
  • Hong Kong

Hitachi Ultrahigh-Resolution Scanning Electron Microscope SU8600



UltraHigh-Resolution

Hitachi’s high-brightness cold field emission source provides ultrahigh-resolution images even at Ultra-low voltages.




RHO-type Zeolite particle at low-kV. In order to reveal fine steps structure on surface, the image was acquired at 0.8 kV of landing voltage. This allows the very fine structure of surface steps to be clearly visible (image on right).


A Smart Detection System for Low Voltage BSE Imaging

Cross section image of 3D NAND;

Oxide layer and Nitride layer of capacitor are easily distinguishable in the image due to BSE detection capability.


Cross Section of 3D NAND (Acceleration Voltage: 1.5 kV)


Fast BSE Imaging : New Out-Column Crystal Type BSED (OCD)

By using new Out-Column Crystal Type BSED (OCD)*, image acquisition time was less than ONE SECOND, yet lower layer interconnect and Fin FET structure of SRAM are clearly visible.


Lower Layer Interconnect of 5 nm process SRAM (Acceleration Voltage: 30 kV, Acquisition time <1 second)

Enhanced User Experience with Advanced Automation

The “EM Flow Creator“ software option allows users to configure repeatable SEM operation sequences.

Various SEM functions can be assembled in the EM Flow Creator’s window by a drag-and-drop method and then saved as a recipe for later use.

Once a recipe is configured, automated data collection under the set conditions can be performed with high accuracy and repeatability.




Flexible Interface

Dual monitor configuration supports a flexible and highly efficient workspace. Display and save 6 signals simultaneously in order to acquire more information in less time


More information about Hitachi Scanning Electron Microscope SU8600, please visit Hitachi High Tech official site at link: 
https://www.hitachi-hightech.com/global/en/products/microscopes/sem-tem-stem/fe-sem/su8600.html

Application:
Semi-conductor, Nano Material, Advance Material

Top
Micro-blog Sina Facebook

Contact UsMore

Hong Kong
  • 2606, 26/F., Tower 1, Ever Gain Plaza, 88 Container Port Road, Kwai Chung, N.T., Hong Kong
  • +852-27519488 / WhatsApp/WeChat HK: +852-8491 7250
  • techcomp@techcomp.com.hk
Singapore
  • 2 International Business Park, #09-06 Tower 1 The Strategy, Singapore 609930
  • +65-62678921
  • techcomp@techcomp.com.sg

Powered By QianYe

All Right Reserved 1988-2025©TECHCOMP GROUP
× Sweep The Concern Us