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Hitachi Nano 3D Optical Interferometry System

Hitachi VS1800 Nano 3D Optical Interferometry System

Hitachi VS1800 is a new generation surface topography measurement system for high-performance thin films, semiconductors, automotive parts, packing, and displays.

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  • Hong Kong SAR

Hitachi VS1800 is designed to measure the micro-surface topography of the object sample in a noncontact manner by scanning the interference image, which can meet the high-precision measurement requirements of high-performance thin films, semiconductors, automotive parts, displays, and other industries. It can also measure the film thickness and the layer structure of the transparent film with the layer-cross section function.

Main Features:

1)   Wide area and high resolution

Z resolution: 0.01 nm (Phase mode)

Z resolution does not depend on the magnification of the objective lens

Achieve high resolution for Z in a wide area

Maximum one-shot measurement area: 6.4 mm × 6.4 mm

Wide area measurement by stitching images

2)   Reliable measurement repeatability

- Using interference fringes as measurement scale

- less than 0.1% repeatability (Phase mode)

3)   Non-contact and fast 3D Measurement

- No damage to the sample

- Fast measurement by non-scanning areal method

- 3D shape evaluation realizes quantification of differences which was difficult only with line profile

4)   Film thickness measurement of transparent material

- Non-destructive measurement of layer thickness of multilayer structure, depth of foreign matter and defective portion

- Measurement of interfaces with small refractive index difference

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