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AeroSurf 1500 tabletop atmospheric scanning electron microscope

Hitachi developed a new concept in scanning electron microscopes, atmospheric SEM (ASEM), and have commercialized it as AeroSurf 1500. AeroSurf 1500 was equipped an extremely thin membrane which separates the evacuated column and atmospheric-pressure chamber, enabling SEM observation at an atmospheric pressure as well as under vacuum.  Wet specimens can be observed in their natural state without preprocessing, enabling the observation of typically difficult specimens, such as bulk or wet samples.  It also allows SEM observation of samples under low-vacuum conditions simply by removing the membrane

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  • Hong Kong SAR

Hitachi AeroSurf 1500 tabletop atmospheric scanning electron microscope

Hitachi AeroSurf 1500 is an atmospheric tabletop microscope, which can be used to carry out SEM observations under ambient conditions.  It was designed with a focus on water-containing samples such as soft materials or biological materials.



·         SEM observation of wet samples at an atmospheric pressure without preprocessing

·         SEM observation under a wide range of pressure from low vacuum to atmosphere (105Pa)

·         ES-Corrector equipped as standard for correcting the scattering of electron beams

·         A compact design (330 mm wide) for maximizing the lab space

·         EDS analysis also available (optional) for the vacuum mode




Electron gun

Pre-centered cartridge filament


High-sensitivity Semiconductor BSE Detector

Accelerating voltage

5 kV/15 kV


15 x to 60,000 x (240,000 x with digital zoom)

Observation Pressure

Atmospheric mode (105 Pa) with the membrane

Negative pressure mode (approx. 103 Pa to 105 Pa) with the membrane

Vacuum mode (approx. values between few Pa to several tens Pa) without membrane

Max Sample Size

55 mm in diameter


Main unit: 330 (W) x 687 (D) x 565 (H) mm, 67.0 kg

Control unit: 220 (W) x 368 (D) x 235 (H)  mm, 11.8 kg

Diaphragm pump: 145 (W) x 256 (D) x 217 (H)  mm, 4.5 kg (x2)

Application: Food Detection, Biotechnology, Forensic Science, Medical Laboratory, Environmental Science

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