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Field Emission Transmission Electron Microscope

The HF-3300 is a 100-300 kV TEM/STEM/SEM powered by Hitachi's state-of-the-art cold field emission technology for high-brightness and high-energy resolution. Capabilities needed for daily material structural characterizations and analysis are provided. Unique electron optical designs include spatially resolved EELS and double biprism electron holography (special order). The simultaneous secondary electron imaging and STEM imaging reveal surface and bulk structures at the same time. A special version for gas environmental TEM or aberration-corrected microscopy is available.

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  • Hong Kong SAR

Hitachi Field Emission Transmission Electron Microscope HF-3300

Transmission Electron Microscope is an essential instrument in surface science. Hitachi HF3300 is a high resolution transmission electron microscope for most materials (metals, ceramics, etc.) samples. It can simplify the sample preparation, ensure high resolution, and also meet the requirements of high spatial resolution analysis. With the combination of EELS and nanobeam diffraction function, the distribution of nanoscale elements and crystal structure can be studied. The unique analytical capabilities and user-friendly operation also greatly expand its application fields.


·   High-brightness Cold Field Emission (Cold FE) electron source

Cold field emission electron source benefits nanoscale analysis with its high brightness and high-energy resolution. Its inherent high coherency greatly contributes to ultra-high resolution imaging and electron holography.

·   300 kV accelerating voltage

A 300 kV accelerating voltage allows atomic-resolution imaging for thick specimens. Metals and ceramics with high atomic numbers are less electron transparent and often need to be observed at a 300 kV accelerating voltage.

·   Unique analytical capabilities

The newly introduced spatially resolved EELS and the in-situ SEM/TEM imaging nanobeam electron diffraction provide sophisticated and unique analytical capabilities.

·   Holder linkage with the FIB system

The Hitachi-FIB-compatible specimen holder requires no tweezer handling of TEM grids between FIB fabrication and TEM observation and ensures high-throughput TEM analysis. Hitachi's unique specimen rotation holder enables real-time multidirectional structural analysis together with an STEM unit.

·   User-friendly operation

Windows-based TEM/STEM computer control, a motor-driven movable aperture, and a 5-axis motorized stage make the high-end TEM more accessible. It only takes 10 minutes to be high-voltage-ready and 1 minute for specimen exchange, providing high sample throughput for TEM analysis.




Electron source

W(310) cold field emission electron source

Accelerating voltage

300 kV, 200 kV*2, 100 kV*2



0.10 nm


0.19 nm

Information limit

0.13 nm


Low Mag mode

200 - 500×

High Mag mode

2,000 - 1,500,000×

Image rotation

±5° or less (High Mag mode, below 1,000,000×)

Specimen tilt


Camera length

300 - 3,000 mm

Application: Material Science, Semiconductors

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