Hitachi Nano 3D Optical Interferometry System
Hitachi VS1800 Nano 3D Optical Interferometry System
Hitachi VS1800 is a new generation surface topography measurement system for high-performance thin films, semiconductors, automotive parts, packing, and displays.
DownloadHitachi VS1800 is designed to measure the micro-surface topography of the object sample in a noncontact manner by scanning the interference image, which can meet the high-precision measurement requirements of high-performance thin films, semiconductors, automotive parts, displays, and other industries. It can also measure the film thickness and the layer structure of the transparent film with the layer-cross section function.
Main Features:
1) Wide area and high resolution
- Z resolution: 0.01 nm (Phase mode)
- Z resolution does not depend on the magnification of the objective lens
- Achieve high resolution for Z in a wide area
- Maximum one-shot measurement area: 6.4 mm × 6.4 mm
- Wide area measurement by stitching images
2) Reliable measurement repeatability
- Using interference fringes as measurement scale
- less than 0.1% repeatability (Phase mode)
3) Non-contact and fast 3D Measurement
- No damage to the sample
- Fast measurement by non-scanning areal method
- 3D shape evaluation realizes quantification of differences which was
difficult only with line profile
4) Film thickness measurement of transparent material
- Non-destructive measurement of layer thickness of multilayer structure, depth of foreign matter and defective portion
- Measurement of interfaces with small refractive index difference