Hitachi AFM5500M
The AFM5500M is a SPM platform equipped with a fully addressable 4-inch stage, optimized for medium-sized samples. It affords exceptional levels of ease of use, automation, and accuracy, as well as correlation for AFM/SEM investigations.
DownloadFeatures:
- Ease of Use
Significantly simplifying the AFM operation
Wide-open tip and sample access
Fully addressable 4-inch stage eliminating the need for sample remount/rotation
Point-and-click function enabling easy and quick camera-based sample navigation
All built-in accessories allowing seamless and software-controlled mode switching
- Easier, faster, and more precise AFM imaging
Automated cantilever exchange; Automated laser alignment; Automated image optimization (RealTune? II); Automated AFM measurements following a recipe
- Enhanced accuracy of AFM measurements
Flexure-based design providing superior flat and orthogonal scan
Closed-loop scanner allowing highly linear and accurate imaging
Low sensor noise yielding high-resolution and high-quality results
Tip evaluation capability ensuring probe quality and artifact-free images
- Correlative AFM and SEM Imaging
The Hitachi-proprietary SEM/AFM shared alignment holder provides quick and easy measurements and analysis of topography, structures, composition, and surface property.
Specifications:
Stage |
Automated, fully addressable 100
mm (4 inch) stage |
Sample Size |
Diameter:100 mm (4
inch) |
Scan Range |
200 μm x 200 μm x 15 μm (XY: Closed loop control, Z: Displacement sensor) |
RMS Noise Level* |
≤0.04 nm (High-resolution mode) |
Repeatability* |
XY: ≤15 nm(3σ, measuring 10 μm pitch)/Z: ≤1 nm (3σ, measuring 100 nm depth) |
XY Orthogonality |
±0.5° |
Bow* |
≤2 nm/50 μm |
Detection |
Optical lever (Low-coherence light) |
Top-view Optical Microscope |
Zoom magnification: x1 ~ x7 |
Anti-vibration |
Desktop active anti-vibration 500 mm(W) x 600 mm (D) x 84 mm (H), approximately 28kg |
Soundproof Cover |
750 mm(W) x 877 mm (D) x 1400 mm(H), approximately 237 kg |
Size |
400 mm(W) x 526 mm(D) x 550 mm(H), approximately 90 kg |
Application:
Application areas: Materials science, biology, chemistry.
Video Introduction: