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Surface science
Hitachi AFM5500M

The AFM5500M is a SPM platform equipped with a fully addressable 4-inch stage, optimized for medium-sized samples. It affords exceptional levels of ease of use, automation, and accuracy, as well as correlation for AFM/SEM investigations.

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Sale area:
  • Hong Kong SAR

Features:

 

  • Ease of Use

Significantly simplifying the AFM operation

Wide-open tip and sample access

Fully addressable 4-inch stage eliminating the need for sample remount/rotation

Point-and-click function enabling easy and quick camera-based sample navigation

All built-in accessories allowing seamless and software-controlled mode switching

  • Easier, faster, and more precise AFM imaging

Automated cantilever exchange; Automated laser alignment; Automated image optimization (RealTune? II); Automated AFM measurements following a recipe

  • Enhanced accuracy of AFM measurements

Flexure-based design providing superior flat and orthogonal scan

Closed-loop scanner allowing highly linear and accurate imaging

Low sensor noise yielding high-resolution and high-quality results
Tip evaluation capability ensuring probe quality and artifact-free images

  • Correlative AFM and SEM Imaging

The Hitachi-proprietary SEM/AFM shared alignment holder provides quick and easy measurements and analysis of topography, structures, composition, and surface property.

 

Specifications:

 

Stage

Automated, fully addressable 100 mm (4 inch) stage
Travel range: XY ±50 mm (2 inch), Z ≥21 mm
Minimum step size: XY 2 μm, Z 0.04 μm

Sample Size

Diameter100 mm (4 inch) 
Thickness
20 mm
Weight
2 kg

Scan Range

200 μm x 200 μm x 15 μm (XY: Closed loop control, Z: Displacement sensor)

RMS Noise Level*

≤0.04 nm (High-resolution mode)

Repeatability*

XY: ≤15 nm(3σ, measuring 10 μm pitch)/Z: ≤1 nm (3σ, measuring 100 nm depth)

XY Orthogonality

±0.5°

Bow*

≤2 nm/50 μm

Detection

Optical lever (Low-coherence light)

Top-view Optical Microscope

Zoom magnification: x1 x7
Field of vision: 910 μm x 650 μm
130 μm x 90 μm 
Monitor magnification: x465
x3255 (27 inch monitor)

Anti-vibration

Desktop active anti-vibration 500 mm(W) x 600 mm (D) x 84 mm (H), approximately 28kg

Soundproof Cover

750 mm(W) x 877 mm (D) x 1400 mm(H), approximately 237 kg

Size

400 mm(W) x 526 mm(D) x 550 mm(H), approximately 90 kg

 

Application:

Application areas: Materials science, biology, chemistry.

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